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Effects of deposition conditions on step-coverage quality in low-pressure chemical vapor deposition of HfO2 - ScienceDirect
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Dependence of step coverage on deposition temperature. Step coverage is... | Download Scientific Diagram
Study of the step coverage and contact resistance by using two-step TiN barrier and evolve simulation
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Enhanced step coverage by oblique angle physical vapor deposition: Journal of Applied Physics: Vol 97, No 12
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